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Effect of fluid losses and acoustic resonances in CMUTs with vented cavities
- Issue Date
- Jun-2015
- Publisher
- Institute of Electrical and Electronics Engineers Inc.
- Keywords
- Airborne ultrasound; CMUT; high pressure; Navier-Stokes equations; wide bandwidth
- Citation
- 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, pp.682 - 685
- Indexed
- SCOPUS
- Journal Title
- 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
- Start Page
- 682
- End Page
- 685
- Abstract
- We report on capacitive micromachined ultrasonic transducers (CMUTs) with vented cavities for varying their bandwidth and sensitivity in airborne applications. The devices are simulated using a finite element model which incorporates viscous and thermal fluid losses in the squeeze film and the vent holes, as well as acoustic radiation and acoustic resonance in the backing. Our model accurately predicts the behavior of such CMUTs. The model is also validated with measurements at elevated pressure.
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Related Researcher
- Park, Kwan Kyu
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)