Metal-HfO2-Ge capacitor: Its enhanced charge trapping properties with S-treated substrate and atomic-layer-deposited HfO2 layer
DC Field | Value | Language |
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dc.contributor.author | Park, In-Sung | - |
dc.contributor.author | Jung, Yong Chan | - |
dc.contributor.author | Seong, Sejong | - |
dc.contributor.author | Ahn, Jinho | - |
dc.contributor.author | Lee, Sung Bo | - |
dc.date.accessioned | 2022-07-16T00:55:22Z | - |
dc.date.available | 2022-07-16T00:55:22Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2015-01 | - |
dc.identifier.issn | 0734-2101 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/158105 | - |
dc.description.abstract | The charge trapping properties of metal-HfO2-Ge capacitor as a nonvolatile memory have been investigated with (NH4)(2)S-treated Ge substrate and atomic-layer-deposited HfO2 layer. The interfacial layer generated by (NH4)(2)S-treated Ge substrate reveals a trace of -S- bonding, very sharp interface edges, and smooth surface morphology. The Ru-HfO2-Ge capacitor with (NH4)(2)S-treated Ge substrate shows an enhanced interface state with little frequency dispersion, a lower leakage current, and very reliable properties with the enhanced endurance and retention than Ru-HfO2-Ge capacitor with cyclic-cleaned Ge substrate. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | A V S AMER INST PHYSICS | - |
dc.title | Metal-HfO2-Ge capacitor: Its enhanced charge trapping properties with S-treated substrate and atomic-layer-deposited HfO2 layer | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Ahn, Jinho | - |
dc.identifier.doi | 10.1116/1.4904730 | - |
dc.identifier.scopusid | 2-s2.0-84919946867 | - |
dc.identifier.wosid | 000355735400053 | - |
dc.identifier.bibliographicCitation | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.33, no.1, pp.1 - 7 | - |
dc.relation.isPartOf | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | - |
dc.citation.title | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | - |
dc.citation.volume | 33 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 7 | - |
dc.type.rims | ART | - |
dc.type.docType | Review | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | NONVOLATILE MEMORY | - |
dc.subject.keywordPlus | FILMS | - |
dc.identifier.url | https://avs.scitation.org/doi/10.1116/1.4904730 | - |
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