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Method for the measurement of transferred power to plasma in inductive discharges (vol 547, pg 9, 2013)
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hwang, Hye-Ju | - |
| dc.contributor.author | Kim, Young-Cheol | - |
| dc.contributor.author | Chung, Chin-Wook | - |
| dc.date.accessioned | 2022-07-16T06:32:08Z | - |
| dc.date.available | 2022-07-16T06:32:08Z | - |
| dc.date.created | 2021-05-12 | - |
| dc.date.issued | 2014-01 | - |
| dc.identifier.issn | 0040-6090 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/160968 | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | ELSEVIER SCIENCE SA | - |
| dc.title | Method for the measurement of transferred power to plasma in inductive discharges (vol 547, pg 9, 2013) | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Chung, Chin-Wook | - |
| dc.identifier.doi | 10.1016/j.tsf.2013.12.028 | - |
| dc.identifier.scopusid | 2-s2.0-84891720106 | - |
| dc.identifier.wosid | 000329211000039 | - |
| dc.identifier.bibliographicCitation | THIN SOLID FILMS, v.551, pp.206 - 206 | - |
| dc.relation.isPartOf | THIN SOLID FILMS | - |
| dc.citation.title | THIN SOLID FILMS | - |
| dc.citation.volume | 551 | - |
| dc.citation.startPage | 206 | - |
| dc.citation.endPage | 206 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Correction | - |
| dc.description.journalClass | 1 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
| dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
| dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
| dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S0040609013020749?via%3Dihub | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 1. Journal Articles
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)