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Experimetal investigation on Edge-to-Center density ratio in an inductively coupled plasma

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ConferenceIssue Date2008Citation61th Gaseous Electronics ConferencePublisherAmerican physical societyPlace달라스, 미국
New method to measure the electron temperature in Ar/He mixture capacitive discharge

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ConferenceIssue Date2008Citation61th Gaseous Electronics ConferencePublisheramerican physical societyPlace달라스, 미국
Real-time measurement of electron temperatures and ion densities using self-bias effect in argon inductively coupled plasma

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ConferenceIssue Date2008Citation61th Gaseous Electronics ConferencePublisherAmerican physical societyPlace달라스, 미국
Electron series resonance in an inductive ion etching reactor

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ConferenceIssue Date2008Citation61th Gaseous Electronics ConferencePublisherAmerican Physical SocietyPlaceDallas, USA
Simple analysis method of I-V curve

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ConferenceIssue Date2008Citation61th Gaseous Electronics ConferencePublisherAmerican physical societyPlace달라스, 미국
자기 바이어스 현상을 이용한 전자온도 및 이온밀도 측정연구

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ConferenceIssue Date2008Citation한국진공학회 제3회 하계정기학술대회Publisher한국진공학회Place라마다 호텔, 제주
Langmuir probe perturbation in inductively coupled plasmas

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ConferenceIssue Date2008Citation1st International conference on microelectronics and plasma technologyPublisher한국진공학회PlaceJeju Ramada Plaza Hotel
실시간 플라즈마 진단 기술

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ConferenceIssue Date2008Citation제34회 동계 정기학술대회Publisher한국진공학회Place단국대 죽전캠퍼스
New Plasma Processing Monitoring Technology

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ConferenceIssue Date2008CitationSEMICON KOREA 2007PublisherSEMIPlaceCOEX, SEOUL
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