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Results 341-343 of 343 (Search time: 0.014 seconds).
Langmuir probe perturbation in inductively coupled plasmas
정진욱
Conference
Issue Date
2008
Citation
1st International conference on microelectronics and plasma technology
Publisher
한국진공학회
Place
Jeju Ramada Plaza Hotel
실시간 플라즈마 진단 기술
정진욱
Conference
Issue Date
2008
Citation
제34회 동계 정기학술대회
Publisher
한국진공학회
Place
단국대 죽전캠퍼스
New Plasma Processing Monitoring Technology
정진욱
Conference
Issue Date
2008
Citation
SEMICON KOREA 2007
Publisher
SEMI
Place
COEX, SEOUL
1
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Date Issued
2020 - 2023
74
2010 - 2019
230
2002 - 2009
39
Type
Conference
343
Journal
63rd Gaseous Electronics Conferen...
13
67th Annual Gaseous Electronics C...
13
62th Gaseous Electronics Conference
11
The 72nd Annual Gaseous Electroni...
11
제64회 한국진공학회
11
64th Annual Gaseous Electronics C...
10
66th Gaseous Electronics Conference
10
Gaseous Electronics Conference
10
제 44회 한국진공학회(The 44th Winter Annu...
10
4th ICMAP
9
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