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Results 1-8 of 8 (Search time: 0.001 seconds).
Effect of hybrid plasma source on O radical generation in oxygen plasma
정진욱
Conference
Issue Date
2018
Citation
제55회 하계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
Interpretation of current decrease during E-H transition in a cylindrical inductively coupled plasma
정진욱
Conference
Issue Date
2018
Citation
제55회 하계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
플라즈마 변수들과 웨이퍼 표면 온도의 공간상 분포에 대한 상관관계
정진욱
Conference
Issue Date
2018
Citation
제55회 하계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
Electrical diagnosis method for measurement of electron temperature and ion density using floating potential difference applied square voltage
정진욱
Conference
Issue Date
2018
Citation
제55회 하계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
Control of spatial distribution of plasma density by a capacitively coupled plasma
정진욱
Conference
Issue Date
2018
Citation
제55회 하계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
Effect of multi-step ionization on the tail electron temperature in an argon inductively coupled plasma
정진욱
Conference
Issue Date
2018
Citation
제55회 하계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
Investigation of effect of rf bias frequency on plasma parameters in a remote inductively coupled plasma
정진욱
Conference
Issue Date
2018
Citation
제55회 하계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
Effect of cooling on RF choke filter characteristics
정진욱
Conference
Issue Date
2018
Citation
제55회 하계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
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