Spatial measurements of electron energy distribution and plasma parameters in a weakly magnetized inductive discharge
DC Field | Value | Language |
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dc.contributor.author | Kim, Young-Do | - |
dc.contributor.author | Lee, Young-Kwang | - |
dc.contributor.author | Lee, Hyo-Chang | - |
dc.contributor.author | Chung, Chin-Wook | - |
dc.date.accessioned | 2022-07-16T11:21:07Z | - |
dc.date.available | 2022-07-16T11:21:07Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2013-02 | - |
dc.identifier.issn | 1070-664X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/163509 | - |
dc.description.abstract | Spatial characteristics of plasma parameters such as electron temperature, plasma density, plasma potential, and electron energy distribution (EED) were studied in inductively coupled plasma with an axial dc magnetic field. With dc magnetic field, the measured EEDs in the total electron energy scale are spatially coincided except cutting of the low electron energy part indicating the conserved non-local electron kinetics in an axial direction, even though the dc magnetic field is applied. Spatial distributions of the plasma densities at axial positions have almost same trends with various magnetic field strengths. We also discuss the reduction of the ambipolar potential along the axial direction as the applied magnetic field increased. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Spatial measurements of electron energy distribution and plasma parameters in a weakly magnetized inductive discharge | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chin-Wook | - |
dc.identifier.doi | 10.1063/1.4790664 | - |
dc.identifier.scopusid | 2-s2.0-84874786757 | - |
dc.identifier.wosid | 000317289800066 | - |
dc.identifier.bibliographicCitation | PHYSICS OF PLASMAS, v.20, no.2, pp.1 - 5 | - |
dc.relation.isPartOf | PHYSICS OF PLASMAS | - |
dc.citation.title | PHYSICS OF PLASMAS | - |
dc.citation.volume | 20 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 5 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Fluids & Plasmas | - |
dc.subject.keywordPlus | Dissociation | - |
dc.subject.keywordPlus | Electric power distribution | - |
dc.subject.keywordPlus | Inductively coupled plasma | - |
dc.subject.keywordPlus | Magnetic fields | - |
dc.subject.keywordPlus | Plasma density | - |
dc.subject.keywordPlus | Plasma devices | - |
dc.subject.keywordPlus | Electron energy levels | - |
dc.subject.keywordPlus | Ambipolar | - |
dc.subject.keywordPlus | Applied magnetic fields | - |
dc.subject.keywordPlus | Axial direction | - |
dc.subject.keywordPlus | Axial positions | - |
dc.subject.keywordPlus | DC magnetic field | - |
dc.subject.keywordPlus | Electron energies | - |
dc.subject.keywordPlus | Electron energy distributions | - |
dc.subject.keywordPlus | Electron kinetics | - |
dc.subject.keywordPlus | Inductive discharges | - |
dc.subject.keywordPlus | Magnetic field strengths | - |
dc.subject.keywordPlus | Nonlocal | - |
dc.subject.keywordPlus | Plasma parameter | - |
dc.subject.keywordPlus | Plasma potential | - |
dc.subject.keywordPlus | Spatial characteristics | - |
dc.subject.keywordPlus | Spatial measurements | - |
dc.identifier.url | https://aip.scitation.org/doi/10.1063/1.4790664 | - |
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