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Silicon-Based Low k Dielectric Materials with Remote Plasma ALD
- Authors
- 전형탁
- Issue Date
- 24-Jul-2019
- Place
- Hyatt Regency Bellevue, Seattle, WA, 미국
- Conference Name
- 19th International Conference on Atomic Layer Deposition
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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