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Atomic Layer Deposition of Indium Gallium Zinc Oxide (IGZO) Semiconductor Thin Films: From Precursor to Thin Film Transistor Application
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진성 | - |
| dc.date.accessioned | 2021-08-02T12:58:34Z | - |
| dc.date.available | 2021-08-02T12:58:34Z | - |
| dc.date.issued | 2019-07-23 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/16492 | - |
| dc.title | Atomic Layer Deposition of Indium Gallium Zinc Oxide (IGZO) Semiconductor Thin Films: From Precursor to Thin Film Transistor Application | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 19th International Conference on Atomic Layer Deposition | - |
| dc.citation.conferencePlace | Nellevue, Washington, USA | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)