Effect of adding small amount of inductive fields to O-2, Ar/O-2 capacitively coupled plasmas
DC Field | Value | Language |
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dc.contributor.author | Lee, Min-Hyong | - |
dc.contributor.author | Lee, Hyo-Chang | - |
dc.contributor.author | Chung, Chin-Wook | - |
dc.date.accessioned | 2022-07-16T15:33:04Z | - |
dc.date.available | 2022-07-16T15:33:04Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2012-05 | - |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/165706 | - |
dc.description.abstract | Electron energy distribution functions (EEDFs) of low pressure O-2 plasma were measured by adding small amount of coil power in a capacitive discharge. When the plasma was generated by bias power only, the measured EEDF showed a bi-Maxwellian distribution. However, when a very small coil power (a few Watts) was added, the EEDF evolved abruptly into a Maxwellian distribution, while the electron density was decreased. In an Ar/O-2 mixture discharge, this EEDF evolution to the Maxwellian was also observed at a relatively higher coil power. This abrupt change in EEDFs with a very small coil power appears to be attributed to a combined effect of collisionless heating by capacitive and induced electric fields. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Effect of adding small amount of inductive fields to O-2, Ar/O-2 capacitively coupled plasmas | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chin-Wook | - |
dc.identifier.doi | 10.1063/1.4705362 | - |
dc.identifier.scopusid | 2-s2.0-84864225069 | - |
dc.identifier.wosid | 000304109900014 | - |
dc.identifier.bibliographicCitation | JOURNAL OF APPLIED PHYSICS, v.111, no.9, pp.1 - 4 | - |
dc.relation.isPartOf | JOURNAL OF APPLIED PHYSICS | - |
dc.citation.title | JOURNAL OF APPLIED PHYSICS | - |
dc.citation.volume | 111 | - |
dc.citation.number | 9 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 4 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | ELECTRON-ENERGY DISTRIBUTION | - |
dc.subject.keywordPlus | HEATING-MODE TRANSITION | - |
dc.subject.keywordPlus | OXYGEN DISCHARGES | - |
dc.subject.keywordPlus | ARGON | - |
dc.identifier.url | https://aip.scitation.org/doi/10.1063/1.4705362 | - |
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