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정전기력을 고려한 MEMS 가속도계 진동해석Vibration Analysis of MEMS Accelerometer Undertaking Electrostatic Force
- Other Titles
- Vibration Analysis of MEMS Accelerometer Undertaking Electrostatic Force
- Issue Date
- Apr-2012
- Publisher
- 한국소음진동공학회
- Citation
- 한국소음진동공학회 2012년도 춘계학술대회 논문집, no. , pp.755 - 756
- Indexed
- OTHER
- Journal Title
- 한국소음진동공학회 2012년도 춘계학술대회 논문집
- Start Page
- 755
- End Page
- 756
- ISSN
- 1598-2548
- Files in This Item
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Collections - 서울 공과대학 > 서울 기계공학부 > 1. Journal Articles
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