AZO/Au/AZO multilayer as a transparent conductive electrode
- Authors
- Lee, Seungjun; Bang, Seokhwan; Park, Joohyun; Park, Soyeon; Ko, Youngbin; Jeon, Hyeongtag
- Issue Date
- Apr-2012
- Publisher
- WILEY-V C H VERLAG GMBH
- Keywords
- ALD; Al doped ZnO; multilayers; transparent conducting oxides
- Citation
- PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, v.209, no.4, pp.698 - 701
- Indexed
- SCIE
SCOPUS
- Journal Title
- PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
- Volume
- 209
- Number
- 4
- Start Page
- 698
- End Page
- 701
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/165918
- DOI
- 10.1002/pssa.201127049
- ISSN
- 1862-6300
- Abstract
- A multilayer of Al doped ZnO/gold/Al doped ZnO (AZO/Au/AZO) was deposited by atomic layer deposition (ALD), and its structural, electrical, and optical properties were investigated. The thin Au interlayer was deposited by e-beam evaporator and showed a series of islands. As the Au interlayer thickness increased, the Au islands coalesced resulting in a continuous Au film at 12 nm or thicker. As the Au interlayer thickness increased to 12 nm, the carrier concentration increased from 1.3 x 10(20) to 4.2 x 10(21) cm(-3), the Hall mobility increased from 13.4 to 22.4 cm(2)/Vs, and the resistivity decreased from 2.6 x 10(-3) to 1.2 x 10(-4) Omega cm. However, the transmittance decreased from 80 to 48%. Additionally, the AZO/Au/AZO multilayer was less crystalline than a single AZO layer.
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