Fabrication of a new type of organic-inorganic hybrid superlattice films combined with titanium oxide and polydiacetylene
- Authors
- Yoon, Kwan-Hyuck; Han, Kyu-Seok; Sung, Myung-Mo
- Issue Date
- Jan-2012
- Publisher
- SPRINGER
- Keywords
- organic-inorganic nanohybrid superlattices; molecular layer deposition; atomic layer deposition; polydiacetylene
- Citation
- NANOSCALE RESEARCH LETTERS, v.7, pp.1 - 6
- Indexed
- SCIE
SCOPUS
- Journal Title
- NANOSCALE RESEARCH LETTERS
- Volume
- 7
- Start Page
- 1
- End Page
- 6
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/166559
- DOI
- 10.1186/1556-276X-7-71
- ISSN
- 1931-7573
- Abstract
- We fabricated a new organic-inorganic hybrid superlattice film using molecular layer deposition [MLD] combined with atomic layer deposition [ALD]. In the molecular layer deposition process, polydiacetylene [PDA] layers were grown by repeated sequential adsorption of titanium tetrachloride and 2,4-hexadiyne-1,6-diol with ultraviolet polymerization under a substrate temperature of 100A degrees C. Titanium oxide [TiO2] inorganic layers were deposited at the same temperatures with alternating surface-saturating reactions of titanium tetrachloride and water. Ellipsometry analysis showed a self-limiting surface reaction process and linear growth of the nanohybrid films. The transmission electron microscopy analysis of the titanium oxide cross-linked polydiacetylene [TiOPDA]-TiO2 thin films confirmed the MLD growth rate and showed that the films are amorphous superlattices. Composition and polymerization of the films were confirmed by infrared spectroscopy. The TiOPDA-TiO2 nanohybrid superlattice films exhibited good thermal and mechanical stabilities.
PACS: 81.07.Pr, organic-inorganic hybrid nanostructures; 82.35.-x, polymerization; 81.15.-z, film deposition; 81.15.Gh, chemical vapor deposition (including plasma enhanced CVD, MOCVD, ALD, etc.).
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