Evolution of Two-Dimensional Plasma Density on the E-H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Hyo-Chang | - |
dc.contributor.author | Kim, Young-Cheol | - |
dc.contributor.author | Chung, Chin-Wook | - |
dc.date.accessioned | 2022-07-16T18:24:07Z | - |
dc.date.available | 2022-07-16T18:24:07Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2011-11 | - |
dc.identifier.issn | 0093-3813 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/167250 | - |
dc.description.abstract | Inductively coupled plasmas have two operational modes, i.e., capacitive (E) and inductive (H). In this paper, a 2-D plasma density profile was measured with gas pressures during the E-H heating-mode transition. When the discharge is transited from the E mode to the H mode, the 2-D plasma density profile was not changed at a low gas pressure, whereas the evolution of the 2-D plasma density profile was observed at a high gas pressure. These different changes with the gas pressures on the E-H heating-mode transition originated from the transition of the electron kinetics from the nonlocal kinetics to the local kinetics. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.title | Evolution of Two-Dimensional Plasma Density on the E-H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chin-Wook | - |
dc.identifier.doi | 10.1109/TPS.2011.2135382 | - |
dc.identifier.scopusid | 2-s2.0-81255138055 | - |
dc.identifier.wosid | 000299683400241 | - |
dc.identifier.bibliographicCitation | IEEE TRANSACTIONS ON PLASMA SCIENCE, v.39, no.11, pp.2536 - 2537 | - |
dc.relation.isPartOf | IEEE TRANSACTIONS ON PLASMA SCIENCE | - |
dc.citation.title | IEEE TRANSACTIONS ON PLASMA SCIENCE | - |
dc.citation.volume | 39 | - |
dc.citation.number | 11 | - |
dc.citation.startPage | 2536 | - |
dc.citation.endPage | 2537 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Fluids & Plasmas | - |
dc.subject.keywordPlus | HYSTERESIS | - |
dc.subject.keywordPlus | COIL | - |
dc.subject.keywordAuthor | Capacitive mode | - |
dc.subject.keywordAuthor | capacitive-inductive (E-H) heating-mode transition | - |
dc.subject.keywordAuthor | electron local kinetics | - |
dc.subject.keywordAuthor | electron nonlocal kinetics | - |
dc.subject.keywordAuthor | inductive mode | - |
dc.subject.keywordAuthor | inductively coupled plasma (ICP) | - |
dc.subject.keywordAuthor | plasma heating | - |
dc.identifier.url | https://ieeexplore.ieee.org/document/5762370 | - |
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