Molecular orbital ordering in titania and the associated semiconducting behavior
- Authors
- Park, Joseph; Ok, Kyung-Chul; Ahn, Byung Du; Lee, Je Hun; Park, Jae-Woo; Chung, Kwun-Bum; Park, Jin-Seong
- Issue Date
- Oct-2011
- Publisher
- AMER INST PHYSICS
- Keywords
- annealing; crystallisation; grain boundaries; grain size; molecular electronic states; semiconductor growth; semiconductor materials; semiconductor thin films; sputter deposition; thin film transistors; titanium compounds; X-ray absorption spectra; X-ray diffraction
- Citation
- APPLIED PHYSICS LETTERS, v.99, no.14, pp.1 - 4
- Indexed
- SCIE
SCOPUS
- Journal Title
- APPLIED PHYSICS LETTERS
- Volume
- 99
- Number
- 14
- Start Page
- 1
- End Page
- 4
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/167380
- DOI
- 10.1063/1.3646105
- ISSN
- 0003-6951
- Abstract
- RF-sputtered TiOx layers were thermally treated and the associated thin-film transistor properties were studied. X-ray diffraction and x-ray absorption spectroscopy analyses indicate that as-grown amorphous TiOx films crystallize to anatase at temperatures above 450 degrees C in air. Thin-film transistors incorporating anatase active layers exhibit n-type behavior, with field effect mobility values near 0.11 cm(2)/Vs when annealed at 550 degrees C. Such a phenomenon is suggested to originate from the ordering of Ti 3d orbitals upon crystallization, and the mobility enhancement at higher annealing temperatures may be attributed to the reduced grain boundary scattering of carriers by virtue of enlarged average grain size.
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