E-H mode transition in inductively coupled plasma using Ar, O-2, N-2, and mixture gas
DC Field | Value | Language |
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dc.contributor.author | Lee, Jung-Kyu | - |
dc.contributor.author | Lee, Hyo-Chang | - |
dc.contributor.author | Chung, Chin-Wook | - |
dc.date.accessioned | 2022-07-16T19:13:48Z | - |
dc.date.available | 2022-07-16T19:13:48Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2011-09 | - |
dc.identifier.issn | 1567-1739 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/167691 | - |
dc.description.abstract | A study of the E-H mode transition was performed in Ar, O-2, N-2, and mixture gas inductively coupled plasma (ICP) from the measurement of the electron energy distribution function (EEDF). Changes of the EEDF and characteristics of the discharge on the E-H mode transition were discussed. At each E-mode, the measured EEDFs had different shapes depending on the gas type and pressure, while the EEDFs evolved into Maxwellian distribution with the E-H transition due to electron-electron collisions. This study was also focused on the transition ICP power when the discharge transits from E-mode to H-mode. As the ICP power increased in Ar discharge, the transition ICP power had minimum value at a particular pressure, while the transition ICP power was gradually increased with gas pressures in molecule gas discharge. The transition ICP power with gas mixing ratios was also studied in Ar/O-2/N-2 mixture gas discharge. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER | - |
dc.title | E-H mode transition in inductively coupled plasma using Ar, O-2, N-2, and mixture gas | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chin-Wook | - |
dc.identifier.doi | 10.1016/j.cap.2011.04.009 | - |
dc.identifier.scopusid | 2-s2.0-81155128495 | - |
dc.identifier.wosid | 000296969800033 | - |
dc.identifier.bibliographicCitation | CURRENT APPLIED PHYSICS, v.11, no.5, pp.S149 - S153 | - |
dc.relation.isPartOf | CURRENT APPLIED PHYSICS | - |
dc.citation.title | CURRENT APPLIED PHYSICS | - |
dc.citation.volume | 11 | - |
dc.citation.number | 5 | - |
dc.citation.startPage | S149 | - |
dc.citation.endPage | S153 | - |
dc.type.rims | ART | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | ELECTRON-ENERGY DISTRIBUTION | - |
dc.subject.keywordPlus | HYSTERESIS | - |
dc.subject.keywordPlus | DISCHARGES | - |
dc.subject.keywordPlus | COIL | - |
dc.subject.keywordAuthor | Inductively coupled plasma | - |
dc.subject.keywordAuthor | E-H mode transition | - |
dc.subject.keywordAuthor | Inductive mode | - |
dc.subject.keywordAuthor | Capacitive mode | - |
dc.subject.keywordAuthor | Electron energy distribution | - |
dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S1567173911002203?via%3Dihub | - |
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