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신호왜곡 현상을 고려한 MEMS 가속도 센서 모델링 및 성능특성 분석MEMS Accelerometer Modeling and Performance Analysis by Considering Signal Distortion
- Other Titles
- MEMS Accelerometer Modeling and Performance Analysis by Considering Signal Distortion
- Issue Date
- Feb-2011
- Publisher
- 한국소음진동공학회
- Keywords
- 마이크로 기전 시스템; 가속도 센서; 민감도; 측정가능 주파수; 신호왜곡; MEMS; Accelerometer; Sensitivity; Measurable Frequency Range; Signal Distortion
- Citation
- 한국소음진동공학회논문집, v.21, no.2, pp.106 - 111
- Indexed
- KCI
- Journal Title
- 한국소음진동공학회논문집
- Volume
- 21
- Number
- 2
- Start Page
- 106
- End Page
- 111
- ISSN
- 1598-2785
- Abstract
- In this paper, assumed mode method on Euler beam theory is employed and signal distortion is considered to obtain the performances of a MEMS accelerometer which are a sensitivity and measurable frequency range(MFR). Not only the sensitivities and MFR but also the variations of dynamic responses and natural frequencies of the MEMS accelerometer are investigated for several sets of beam properties such as length, width, thickness and Young’s modulus. It is stated that the variations of beam properties significantly influence the performances of the MEMS accelerometer and the relationship between sensitivities and MFR is inversely proportional to each other.
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Collections - 서울 공과대학 > 서울 기계공학부 > 1. Journal Articles
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