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MoO_3 분말의 수소환원을 통한 CIGS계 후면 전극용 Mo 박막제조Fabrication of Mo Thin Film by Hydrogen Reduction of MoO_3 Powder for Back Contact Electrode of CIGS

Other Titles
Fabrication of Mo Thin Film by Hydrogen Reduction of MoO_3 Powder for Back Contact Electrode of CIGS
Authors
Jo, Tae SunKim, Se HoonKim, Young Do
Issue Date
Feb-2011
Publisher
KOREAN INST METALS MATERIALS
Keywords
solar cells; vapor deposition; hydrogen reduction; electrical properties; conductivity/resistivity
Citation
KOREAN JOURNAL OF METALS AND MATERIALS, v.49, no.2, pp.187 - 191
Indexed
SCIE
SCOPUS
KCI
Journal Title
KOREAN JOURNAL OF METALS AND MATERIALS
Volume
49
Number
2
Start Page
187
End Page
191
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/169154
DOI
10.3365/KJMM.2011.49.2.187
ISSN
1738-8228
Abstract
In order to obtain a suitable back contacting electrode for Cu(InGa)Se-2-based photovoltaic devices, a molybdenum thin film was deposited using a chemical vapor transport (CVT) during the hydrogen reduction of MoO3 powder. A MoO2 thin film was successfully deposited on substrates by using the CVT of volatile MoO3(OH)(2) at 550 degrees C for 60 min in a H-2 atmosphere. The Mo thin film was obtained by reduction of MoO2 at 650 degrees C in a H-2 atmosphere. The Mo thin film on the substrate presented a low sheet resistance of approximately 1 Omega/sq.
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Kim, Young Do
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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