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Shrinkage and expansion mechanisms of SiO2 elliptical membrane nanopores

Authors
Shin, Jae WonLee, Jeong YongOh, Do HyunKim, Tae WhanCho, Woon Jo
Issue Date
Dec-2008
Publisher
AMER INST PHYSICS
Keywords
electron beam effects; geometry; nanoporous materials; nanotechnology; shrinkage; silicon compounds; transmission electron microscopy
Citation
APPLIED PHYSICS LETTERS, v.93, no.22, pp.1 - 3
Indexed
SCIE
SCOPUS
Journal Title
APPLIED PHYSICS LETTERS
Volume
93
Number
22
Start Page
1
End Page
3
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/171755
DOI
10.1063/1.3027062
ISSN
0003-6951
Abstract
20 nm SiO2 elliptical membrane nanopores with various thicknesses were directly formed in situ by using a focused electron beam with transmission electron microscopy (TEM). The shrinkage and the expansion behaviors of the SiO2 ellipse nanopores with different thicknesses were attributed to variations in their geometries, in particular their curvatures. The geometric mechanisms of elliptical nanopores with various thicknesses fabricated utilizing a SiO2 membrane with a thickness gradient by using an electron beam irradiation are described on the basis of TEM images, which depend on the electron beam irradiation time.
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