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The effect of C(60) cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shon, Hyun Kyong | - |
| dc.contributor.author | Lee, Tae Geol | - |
| dc.contributor.author | Kim, Dahl Hyun | - |
| dc.contributor.author | Kang, Hee Jae | - |
| dc.contributor.author | Lee, Byoung Hoon | - |
| dc.contributor.author | Sung, Myung Mo | - |
| dc.contributor.author | Moon, Dae Won | - |
| dc.date.accessioned | 2022-10-07T09:43:21Z | - |
| dc.date.available | 2022-10-07T09:43:21Z | - |
| dc.date.created | 2022-08-26 | - |
| dc.date.issued | 2008-12 | - |
| dc.identifier.issn | 0169-4332 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/171765 | - |
| dc.description.abstract | The effects of C(60) cluster ion beam bombardment in sputter depth pro. ling of inorganic-organic hybrid multiple nm thin films were studied. The dependence of SIMS depth profiles on sputter ion species such as 500 eV Cs(+), 10 keV C(60)(+), 20 keV C(60)(2+) and 30 keV C(60)(3+) was investigated to study the effect of cluster ion bombardment on depth resolution, sputtering yield, damage accumulation, and sampling depth. | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | ELSEVIER SCIENCE BV | - |
| dc.title | The effect of C(60) cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Sung, Myung Mo | - |
| dc.identifier.doi | 10.1016/j.apsusc.2008.05.157 | - |
| dc.identifier.scopusid | 2-s2.0-56449119252 | - |
| dc.identifier.wosid | 000261259400068 | - |
| dc.identifier.bibliographicCitation | APPLIED SURFACE SCIENCE, v.255, no.4, pp.1055 - 1057 | - |
| dc.relation.isPartOf | APPLIED SURFACE SCIENCE | - |
| dc.citation.title | APPLIED SURFACE SCIENCE | - |
| dc.citation.volume | 255 | - |
| dc.citation.number | 4 | - |
| dc.citation.startPage | 1055 | - |
| dc.citation.endPage | 1057 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Article; Proceedings Paper | - |
| dc.description.journalClass | 1 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Chemistry | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Chemistry, Physical | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
| dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
| dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
| dc.subject.keywordPlus | SYSTEMS | - |
| dc.subject.keywordAuthor | ToF-SIMS | - |
| dc.subject.keywordAuthor | Inorganic-organic multiple nm thin films | - |
| dc.subject.keywordAuthor | C(60) cluster ion bombardment | - |
| dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S0169433208011380?via%3Dihub | - |
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Related Researcher
- Sung, Myung Mo
- COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF CHEMISTRY)