High-resolution patterning of aluminum thin films with a water-mediated transfer process

Abstract

Water-mediated nanotransfer printing (nTP) is based on the direct transfer of a metal thin film from a stamp to a substrate via water-mediated surface bonding between the stamp and the substrate. The procedure can generate aluminum patterns with feature sizes as small as 60 ran (see figure). The transferred Al patterns are chemically bound to the substrate surface and, thus, exhibit strong adhesion.