Layer-by-layer photonic crystal fabricated by low-temperature atomic layer deposition
- Authors
- Lee, Jae-Hwang; Leung, Wai; Ahn, Jinho; Lee, Taeho; Park, In-Sung; Constant, Kristen; Ho, Kai-Ming
- Issue Date
- Apr-2007
- Publisher
- AMER INST PHYSICS
- Citation
- APPLIED PHYSICS LETTERS, v.90, no.15, pp.1 - 4
- Indexed
- SCIE
SCOPUS
- Journal Title
- APPLIED PHYSICS LETTERS
- Volume
- 90
- Number
- 15
- Start Page
- 1
- End Page
- 4
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/172324
- DOI
- 10.1063/1.2720752
- ISSN
- 0003-6951
- Abstract
- Layer-by-layer three-dimensional photonic crystals are fabricated by low-temperature atomic layer deposition of titanium dioxide on a polymer template created by soft lithography. With a highly conformal layer of titanium dioxide, a significantly enhanced photonic band gap effect appears at 3.1 mu m in transmittance and reflectance. From optical investigations of systematically shifted structures, the robust nature of the photonic band gap with respect to structural fluctuations is confirmed experimentally. With angle-resolved Fourier-transform spectroscopy, the authors also demonstrate that the fabricated photonic crystal can be a diffraction-free device as the photonic band gap exists over the diffracting regime.
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