Role of hydrogen in evolution of plasma parameters and dust growth in capacitively coupled dusty plasmas
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chai, K. B. | - |
dc.contributor.author | Choe, Wonho | - |
dc.contributor.author | Seon, C. R. | - |
dc.contributor.author | Chung, C. W. | - |
dc.date.accessioned | 2022-12-20T11:18:56Z | - |
dc.date.available | 2022-12-20T11:18:56Z | - |
dc.date.created | 2022-08-26 | - |
dc.date.issued | 2010-11 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/173550 | - |
dc.description.abstract | The temporal behavior of naturally produced dust parameters (radius and density) and plasma parameters (electron temperature and ion flux) was investigated in radio frequency SiH4/H-2/Ar plasmas. As a result, the electron temperature and ion flux were shown to be strongly correlated with the three-step dust growth pattern. In addition, the generation of dust particles was suppressed by mixing more hydrogen gas due to the plasma chemistry, and consequently, the dust growth rate in the molecular accretion growth, which is known to be proportional to the growth rate of thin film deposition, increased. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Role of hydrogen in evolution of plasma parameters and dust growth in capacitively coupled dusty plasmas | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, C. W. | - |
dc.identifier.doi | 10.1063/1.3518722 | - |
dc.identifier.scopusid | 2-s2.0-78649308840 | - |
dc.identifier.wosid | 000284545200016 | - |
dc.identifier.bibliographicCitation | APPLIED PHYSICS LETTERS, v.97, no.20, pp.1 - 4 | - |
dc.relation.isPartOf | APPLIED PHYSICS LETTERS | - |
dc.citation.title | APPLIED PHYSICS LETTERS | - |
dc.citation.volume | 97 | - |
dc.citation.number | 20 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 4 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | DISCHARGE | - |
dc.identifier.url | https://aip.scitation.org/doi/10.1063/1.3518722 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.