Direct nanoprinting by liquid-bridge-mediated nanotransfer moulding

Abstract

Several techniques for the direct printing of functional materials have been developed to fabricate micro-and nanoscale structures and devices. We report a new direct patterning method, liquid-bridge-mediated nanotransfer moulding, for the formation of two- or three-dimensional structures with feature sizes as small as tens of nanometres over large areas up to 4 inches across. Liquid-bridge-mediated nanotransfer moulding is based on the direct transfer of various materials from a mould to a substrate through a liquid bridge between them. We demonstrate its usefulness by fabricating nanowire field-effect transistors and arrays of pentacene thin-film transistors.