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Cyclopentadienyl 계열 cocktail 전구체를 상용한 Hf1-xZrxO2 박막의 강유전 특성 및 계면처리에 따른 강유전 특성 향상
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안지훈 | - |
| dc.date.accessioned | 2022-12-20T15:36:14Z | - |
| dc.date.available | 2022-12-20T15:36:14Z | - |
| dc.date.issued | 20201217 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/174114 | - |
| dc.title | Cyclopentadienyl 계열 cocktail 전구체를 상용한 Hf1-xZrxO2 박막의 강유전 특성 및 계면처리에 따른 강유전 특성 향상 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국표면공학회 2020 추계학술대회 | - |
| dc.citation.conferencePlace | 부산 | - |
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Related Researcher
- Ahn, Ji Hoon
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)