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Cyclopentadienyl 계열 cocktail 전구체를 상용한 Hf1-xZrxO2 박막의 강유전 특성 및 계면처리에 따른 강유전 특성 향상
- Authors
- 안지훈
- Issue Date
- 20201217
- Place
- 부산
- Conference Name
- 한국표면공학회 2020 추계학술대회
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Related Researcher
- Ahn, Ji Hoon
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)