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Design and modeling of a microwave plasma enhanced chemical vapor deposition system
- Authors
- Ming-Chieh Lin
- Issue Date
- 18-Jun-2019
- Publisher
- PIERS2019 Committees
- Citation
- The 41st Progress In Electromagnetics Research Symposium (PIERS 2019)
- Conference Name
- The 41st Progress In Electromagnetics Research Symposium (PIERS 2019)
- Place
- Rome, Italy
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Lin, Ming Chieh
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)