Improved measurement method for electron energy distribution functions with high accuracy and reliability
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Bang, Jin Young | - |
dc.contributor.author | Kim, Aram | - |
dc.contributor.author | Chung, Chin Wook | - |
dc.date.accessioned | 2022-12-20T17:27:16Z | - |
dc.date.available | 2022-12-20T17:27:16Z | - |
dc.date.created | 2022-08-27 | - |
dc.date.issued | 2010-06 | - |
dc.identifier.issn | 1070-664X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/174853 | - |
dc.description.abstract | An improved ac superimposed method for measuring the electron energy distribution function (EEDF) with high accuracy is proposed. Although high amplitude of the superimposed ac voltage provides a higher signal-to-noise ratio (SNR), it causes the distortion in the EEDF. To correct the distortion, we used two different EEDFs measured by applying two different amplitudes. The distortion was accurately corrected over the entire electron energy region, and the corrected EEDF had the better SNR. The reliability of the corrected EEDF was proved by comparing the effective electron temperatures obtained from the measured EEDFs, and as a result, the corrected EEDF was very reliable. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Improved measurement method for electron energy distribution functions with high accuracy and reliability | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chin Wook | - |
dc.identifier.doi | 10.1063/1.3432118 | - |
dc.identifier.scopusid | 2-s2.0-77954113549 | - |
dc.identifier.wosid | 000280143200064 | - |
dc.identifier.bibliographicCitation | PHYSICS OF PLASMAS, v.17, no.6, pp.1 - 4 | - |
dc.relation.isPartOf | PHYSICS OF PLASMAS | - |
dc.citation.title | PHYSICS OF PLASMAS | - |
dc.citation.volume | 17 | - |
dc.citation.number | 6 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 4 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Fluids & Plasmas | - |
dc.subject.keywordPlus | LANGMUIR PROBE | - |
dc.subject.keywordPlus | PLASMAS | - |
dc.identifier.url | https://aip.scitation.org/doi/10.1063/1.3432118 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.