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Enhancement of the Programming Speed in SANOS Nonvolatile Memory Device Designed Utilizing Al2O3 and SiO2 Stacked Tunneling Layers

Authors
Kim, Hyun WooKim, Dong HunYou, Joo HyungKim, Tae Whan
Issue Date
May-2010
Publisher
IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG
Keywords
SANOS; SONOS; charge transport; silicon nitride; stacked tunneling layer
Citation
IEICE TRANSACTIONS ON ELECTRONICS, v.E93C, no.5, pp.651 - 653
Indexed
SCIE
SCOPUS
Journal Title
IEICE TRANSACTIONS ON ELECTRONICS
Volume
E93C
Number
5
Start Page
651
End Page
653
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/175028
DOI
10.1587/transele.E93.C.651
ISSN
0916-8524
Abstract
The programming characteristics of polysilicon-aluminum oxide-nitride-oxide-silicon (SANOS) nonvolatile memory devices with Al2O3 and SiO2 stacked tunneling layers were investigated. The electron and hole drifts in the Si3N4 layer were calculated to determine the program speed of the proposed SANOS devices. Simulation results showed that enhancement of the programming speed in SANOS was achieved by utilizing SiO2 and Al2O3 stacked tunneling layers.
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