Experimental measurement of the total energy losses in a low pressure inductively coupled argon plasma
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Young-Kwang | - |
dc.contributor.author | Lee, Min-Hyong | - |
dc.contributor.author | Chung, Chin-Wook | - |
dc.date.accessioned | 2022-12-20T21:14:37Z | - |
dc.date.available | 2022-12-20T21:14:37Z | - |
dc.date.created | 2022-08-26 | - |
dc.date.issued | 2009-09 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/176298 | - |
dc.description.abstract | Total energy losses per electron-ion pair lost (epsilon(T)) were measured experimentally in a low pressure inductively coupled argon plasma. A floating probe working at very low bias voltage (similar to 1 V) was used to obtain the electron temperatures and plasma densities at the plasma-sheath boundary. epsilon(T) was found from a power balance equation between the absorbed power and dissipated power by electrons and ions. At 10 mTorr, the measurement shows that the measured epsilon(T)(similar to 100 V) gradually decreased with absorbed power, and this indicates that the ionization efficiency enhances by multistep ionizations. These epsilon(T) are consistent with the theoretical results. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AIP Publishing | - |
dc.title | Experimental measurement of the total energy losses in a low pressure inductively coupled argon plasma | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chin-Wook | - |
dc.identifier.doi | 10.1063/1.3097020 | - |
dc.identifier.scopusid | 2-s2.0-70349501798 | - |
dc.identifier.wosid | 000270096900014 | - |
dc.identifier.bibliographicCitation | APPLIED PHYSICS LETTERS, v.95, no.11, pp.1 - 3 | - |
dc.relation.isPartOf | APPLIED PHYSICS LETTERS | - |
dc.citation.title | APPLIED PHYSICS LETTERS | - |
dc.citation.volume | 95 | - |
dc.citation.number | 11 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 3 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | GLOBAL-MODEL | - |
dc.subject.keywordPlus | DISCHARGE | - |
dc.identifier.url | https://aip.scitation.org/doi/10.1063/1.3097020 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.