SiC nano-particles application to nano-floating gate memory
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Dong Uk | - |
dc.contributor.author | Lee, Tae Hee | - |
dc.contributor.author | Kim, Eun Kyu | - |
dc.contributor.author | Shin, Jin-Wook | - |
dc.contributor.author | Cho, Won-Ju | - |
dc.date.accessioned | 2022-12-20T21:32:14Z | - |
dc.date.available | 2022-12-20T21:32:14Z | - |
dc.date.created | 2022-09-16 | - |
dc.date.issued | 2009-07 | - |
dc.identifier.issn | 0094-243X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/176475 | - |
dc.description.abstract | Nonvolatile memory device with the multi-layered SiC nano-particles embedded in SiO2 dielectrics for long-term data storage was fabricated and its electrical properties were evaluated. The SiC nano-particles were formed by using radio-frequency magnetron sputtering in the argon ambient and post thermal annealing process of SiC film. High-resolution transmission electron microscope analysis showed the multi-layer of SiC nano-particles between tunnel oxide and control oxide layers. The average size and density of the SiC nano-particles were approximately 5 nm and 2×1012 cm-2, respectively. The memory window of nonvolatile memory devices with the multi-layer of SiC nano-particles to define programming and erasing state were about 2.7 V during the operations at ±10 V for 700 ms, and then it was maintained around at 1.1 V after 105 sec. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AIP Publishing | - |
dc.title | SiC nano-particles application to nano-floating gate memory | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Lee, Tae Hee | - |
dc.contributor.affiliatedAuthor | Kim, Eun Kyu | - |
dc.identifier.doi | 10.1063/1.3295531 | - |
dc.identifier.scopusid | 2-s2.0-74849116845 | - |
dc.identifier.bibliographicCitation | AIP Conference Proceedings, v.1199, pp.509 - 510 | - |
dc.relation.isPartOf | AIP Conference Proceedings | - |
dc.citation.title | AIP Conference Proceedings | - |
dc.citation.volume | 1199 | - |
dc.citation.startPage | 509 | - |
dc.citation.endPage | 510 | - |
dc.type.rims | ART | - |
dc.type.docType | Conference Paper | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scopus | - |
dc.identifier.url | https://aip.scitation.org/doi/abs/10.1063/1.3295531 | - |
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