Formation of an Epitaxial CoSi2 Layer with Reduced Oxygen Contamination
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Jaesang | - |
dc.contributor.author | Lee, Keunwoo | - |
dc.contributor.author | Park, Taeyong | - |
dc.contributor.author | Kim, Dongock | - |
dc.contributor.author | Jeon, Hyeongtag | - |
dc.date.accessioned | 2022-12-20T23:00:24Z | - |
dc.date.available | 2022-12-20T23:00:24Z | - |
dc.date.created | 2022-08-26 | - |
dc.date.issued | 2009-03 | - |
dc.identifier.issn | 0013-4651 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/177131 | - |
dc.description.abstract | The formation of epitaxial CoSi2 using an oxide buffer layer is known to be sensitive to the oxygen contamination of the Co film. The oxygen contaminants may originate from various oxygen sources such as ambient annealing. The presence of an oxynitride buffer layer and a Ti-capping layer affect the growth of epitaxial CoSi2, resulting in good epitaxial quality and excellent interface morphology between the Co film and Si substrate. Almost no interference due to oxygen contamination was observed, in spite of intentional exposure of the Co film to air. The oxynitride buffer layer could effectively control the flux of the Co into the Si, resulting in a coherent interface between the CoSi2 and the Si without the formation of additional SiOx. Moreover, the Ti-capping layer could absorb oxygen, resulting in less oxygen contamination. This capping layer positively affected the interface morphology between the Co-silicide and the Si substrate. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELECTROCHEMICAL SOC INC | - |
dc.title | Formation of an Epitaxial CoSi2 Layer with Reduced Oxygen Contamination | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Jeon, Hyeongtag | - |
dc.identifier.doi | 10.1149/1.3095463 | - |
dc.identifier.scopusid | 2-s2.0-63649147797 | - |
dc.identifier.wosid | 000264780400054 | - |
dc.identifier.bibliographicCitation | JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.156, no.5, pp.H352 - H355 | - |
dc.relation.isPartOf | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | - |
dc.citation.title | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | - |
dc.citation.volume | 156 | - |
dc.citation.number | 5 | - |
dc.citation.startPage | H352 | - |
dc.citation.endPage | H355 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Electrochemistry | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalWebOfScienceCategory | Electrochemistry | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.subject.keywordPlus | SILICON | - |
dc.subject.keywordPlus | OXIDE | - |
dc.subject.keywordPlus | SILICIDES | - |
dc.subject.keywordPlus | GROWTH | - |
dc.subject.keywordPlus | FILMS | - |
dc.identifier.url | https://iopscience.iop.org/article/10.1149/1.3095463 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.