Nonvolatile memory property of WSI2 and TISI2 nano-particles in SIO2 dielectrics
DC Field | Value | Language |
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dc.contributor.author | Seo, Ki Bong | - |
dc.contributor.author | Han, Seung Jong | - |
dc.contributor.author | Lee, Dong Uk | - |
dc.contributor.author | Kim, Seon Pil | - |
dc.contributor.author | Kim, Eun Kyu | - |
dc.date.accessioned | 2022-12-20T23:17:55Z | - |
dc.date.available | 2022-12-20T23:17:55Z | - |
dc.date.created | 2022-09-16 | - |
dc.date.issued | 2009-02 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/177243 | - |
dc.description.abstract | We have fabricated the nano-floating gate capacitors with WSi2 and TiSi2 nano-particles embedded in the SiO2 dielectrics. The WSi2 and TiSi2 nano-particles were created from metal silicide films during rapid thermal annealing process, and they have spherical shapes with diameters of 2-5 nm. The electrical properties of the WSi 2 and TiSi2 nano-particles were characterized by using capacitance-voltage measurement. Then, the flat-band voltage shift due to the charging effect of WSi2 and TiSi2 nano-particles were measured about 4.37 V and 4.23 V, respectively, when the bias voltages were swept from -7 V to +7 V. And, their memory windows were decreased from 2.4 V to 1.6 V and 2.7 V to 1 V, respectively, after 1 hr. It showed that the nano-floating gate capacitors with WSi2 and TiSi2 nano-particles have a feasibility of application to nonvolatile memory devices. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | The Minerals, Metals & Materials Society | - |
dc.title | Nonvolatile memory property of WSI2 and TISI2 nano-particles in SIO2 dielectrics | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Kim, Eun Kyu | - |
dc.identifier.scopusid | 2-s2.0-70349445446 | - |
dc.identifier.bibliographicCitation | TMS Annual Meeting, v.3, pp.11 - 16 | - |
dc.relation.isPartOf | TMS Annual Meeting | - |
dc.citation.title | TMS Annual Meeting | - |
dc.citation.volume | 3 | - |
dc.citation.startPage | 11 | - |
dc.citation.endPage | 16 | - |
dc.type.rims | ART | - |
dc.type.docType | Conference Paper | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordPlus | Capacitance voltage measurements | - |
dc.subject.keywordPlus | Charging effect | - |
dc.subject.keywordPlus | Electrical property | - |
dc.subject.keywordPlus | Flat-band voltage shift | - |
dc.subject.keywordPlus | Memory window | - |
dc.subject.keywordPlus | Metal silicide | - |
dc.subject.keywordPlus | Nano-floating | - |
dc.subject.keywordPlus | Nano-floating gate memory | - |
dc.subject.keywordPlus | Non-volatile memories | - |
dc.subject.keywordPlus | Nonvolatile memory | - |
dc.subject.keywordPlus | Nonvolatile memory devices | - |
dc.subject.keywordPlus | Rapid thermal annealing process | - |
dc.subject.keywordPlus | Spherical shape | - |
dc.subject.keywordPlus | TiSi2 | - |
dc.subject.keywordPlus | WSi2 | - |
dc.subject.keywordPlus | Capacitance | - |
dc.subject.keywordPlus | Capacitors | - |
dc.subject.keywordPlus | Functional electric stimulation | - |
dc.subject.keywordPlus | MOS capacitors | - |
dc.subject.keywordPlus | Nonvolatile storage | - |
dc.subject.keywordPlus | Rapid thermal annealing | - |
dc.subject.keywordPlus | Rapid thermal processing | - |
dc.subject.keywordPlus | Silicides | - |
dc.subject.keywordPlus | Titanium compounds | - |
dc.subject.keywordPlus | Nanoparticles | - |
dc.subject.keywordAuthor | Nano-floating gate memory | - |
dc.subject.keywordAuthor | Nano-particles | - |
dc.subject.keywordAuthor | Nonvolatile memory | - |
dc.subject.keywordAuthor | TiSi2 | - |
dc.subject.keywordAuthor | WSi2 | - |
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