Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Formation and Microstructural Properties of Locally Distributed ZnSiO3 Nanoparticles Embedded in a SiO2 Layer by Using a Focused Electron Beam
- Issue Date
- Oct-2008
- Publisher
- AMER SCIENTIFIC PUBLISHERS
- Keywords
- ZnSiO3 Nanocrystal; ZnO Thin Film; Si Substrate; Focused Electron Beam; Nanocrystal Formation Mechanism
- Citation
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.8, no.10, pp.5566 - 5570
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
- Volume
- 8
- Number
- 10
- Start Page
- 5566
- End Page
- 5570
- ISSN
- 1533-4880
- Abstract
- Locally distributed crystalline ZnSiO3 nanoparticles embedded in a SiO2 layer inserted between the ZnO thin film and the Si substrate were formed using transmission electron microscopy (TEM) with a focused electron beam irradiation process. High-resolution TEM (HRTEM) images and energy dispersive X-ray spectroscopy (EDS) profiles showed that ZnSiO3 nanocrystals with a size of approximately 6 nm were formed in the SiO2 layer. The formation mechanisms of the ZnSiO3 nanocrystals in the SiO2 layer are described on the basis of the HRTEM images and the EDS profiles.
- Files in This Item
- Go to Link
- Appears in
Collections - 서울 공과대학 > 서울 융합전자공학부 > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.