Formation and Microstructural Properties of Locally Distributed ZnSiO3 Nanoparticles Embedded in a SiO2 Layer by Using a Focused Electron Beam
- Authors
- Shin, Jae-Won; No, Young-Soo; Kim, Tae Whan; Choi, Won Kook
- Issue Date
- Oct-2008
- Publisher
- AMER SCIENTIFIC PUBLISHERS
- Keywords
- ZnSiO3 Nanocrystal; ZnO Thin Film; Si Substrate; Focused Electron Beam; Nanocrystal Formation Mechanism
- Citation
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.8, no.10, pp.5566 - 5570
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
- Volume
- 8
- Number
- 10
- Start Page
- 5566
- End Page
- 5570
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/177842
- DOI
- 10.1166/jnn.2008.1349
- ISSN
- 1533-4880
- Abstract
- Locally distributed crystalline ZnSiO3 nanoparticles embedded in a SiO2 layer inserted between the ZnO thin film and the Si substrate were formed using transmission electron microscopy (TEM) with a focused electron beam irradiation process. High-resolution TEM (HRTEM) images and energy dispersive X-ray spectroscopy (EDS) profiles showed that ZnSiO3 nanocrystals with a size of approximately 6 nm were formed in the SiO2 layer. The formation mechanisms of the ZnSiO3 nanocrystals in the SiO2 layer are described on the basis of the HRTEM images and the EDS profiles.
- Files in This Item
-
Go to Link
- Appears in
Collections - 서울 공과대학 > 서울 융합전자공학부 > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/177842)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.