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Hybrid Laser Cutting for Flat Panel Display Glass

Authors
Kim, Kwang-RyulKim, Jae-HoonFarson, Dave F.Choi, Hae WoonKim, Kwang-Ho
Issue Date
Aug-2008
Publisher
IOP PUBLISHING LTD
Keywords
laser glass cutting; hybrid laser cutting; flat panel display glass
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS, v.47, no.8, pp.6978 - 6981
Indexed
SCIE
SCOPUS
Journal Title
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume
47
Number
8
Start Page
6978
End Page
6981
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/178091
DOI
10.1143/JJAP.47.6978
ISSN
0021-4922
Abstract
A new laser glass cutting technology using femtosecond and CO2 lasers is presented. Mechanical breaking after scribing using a femtosecond laser was evaluated and compared with the hybrid method for the cutting of flat panel display (FPD) glass. Various laser fluences were tested to determine the threshold energy and optimum grooving conditions without microcracks. The hybrid method was very effective for the FPD glass microfabrication and for performing full cutting without the mechanical breaking process. Consequently, it was found that the FPD panel was clearly cut using the method and the methodologies were very effective even for a mass-production cutting system.
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