Hybrid Laser Cutting for Flat Panel Display Glass
- Authors
- Kim, Kwang-Ryul; Kim, Jae-Hoon; Farson, Dave F.; Choi, Hae Woon; Kim, Kwang-Ho
- Issue Date
- Aug-2008
- Publisher
- IOP PUBLISHING LTD
- Keywords
- laser glass cutting; hybrid laser cutting; flat panel display glass
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS, v.47, no.8, pp.6978 - 6981
- Indexed
- SCIE
SCOPUS
- Journal Title
- JAPANESE JOURNAL OF APPLIED PHYSICS
- Volume
- 47
- Number
- 8
- Start Page
- 6978
- End Page
- 6981
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/178091
- DOI
- 10.1143/JJAP.47.6978
- ISSN
- 0021-4922
- Abstract
- A new laser glass cutting technology using femtosecond and CO2 lasers is presented. Mechanical breaking after scribing using a femtosecond laser was evaluated and compared with the hybrid method for the cutting of flat panel display (FPD) glass. Various laser fluences were tested to determine the threshold energy and optimum grooving conditions without microcracks. The hybrid method was very effective for the FPD glass microfabrication and for performing full cutting without the mechanical breaking process. Consequently, it was found that the FPD panel was clearly cut using the method and the methodologies were very effective even for a mass-production cutting system.
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