Non-linear adaptive control of a linear-motor-driven X-Y table via estimating friction and ripple forces

Abstract

The linear motors are easily affected by load disturbance, ripple force, friction, and parameter variations because there is no mechanical transmission to reduce the effects of external disturbance. For high-speed/high-accuracy position control of a linear-motor-driven X-Y table, a non-linear adaptive controller including a cross-coupling algorithm is proposed in this paper. The non-linear effects such as friction and ripple force are estimated and compensated. The cross-coupling algorithm is adopted to reduce the contour error of the two-axial system. The performance of the proposed controller is evaluated through the computer simulations and experiments.