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A molecular dynamics study of the deposition and the diffusion behaviors of Al on a Cu surface

Authors
Kim, Sang-PilLee, Kwang RyeolChung, Yong ChaeKim, Young-KeunDoi, MasaakiSahashi, Masashi
Issue Date
Apr-2008
Publisher
KOREAN PHYSICAL SOC
Keywords
MD simulation; Cu-Al; surface diffusion; thin film growth
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.52, no.4, pp.1241 - 1245
Indexed
SCIE
SCOPUS
KCI
Journal Title
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume
52
Number
4
Start Page
1241
End Page
1245
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/178774
DOI
10.3938/jkps.52.1241
ISSN
0374-4884
Abstract
The deposition and the diffusion behaviors of Al atoms on Cu surfaces of various orientations were investigated by using classical molecular dynamics simulations and molecular static calculations. Al atoms with a kinetic energy of 0.1 eV were deposited at room temperature. On the Cu(001) surface, the deposited Al atoms tend to agglomerate only with adjacent atoms. In the case of the Cu(111) surface, surface diffusion of Al atoms is significant even as a time scale between two consecutive depositions (5 ps). Most deposited atoms are, thus, agglomerated near the surface step. In contrast, Al atoms deposited on Cu(011) hardly diffuse on the surfaces but intermix with the Cu atoms, resulting in an atomistically rough interface. These behaviors are consistent with changes in the activation barrier for a possible kinetic process that depends on the orientation of the substrate.
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