A two-step annealing process for Ni silicide formation in an ultra-thin body RF SOI MOSFET
- Authors
- Ahn, Chang-Geun; Kim, Tae-Youb; Yang, Jong-Heon; Baek, In-Bok; Cho, Won-Ju; Lee, Seongjae
- Issue Date
- Feb-2008
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- ultra-thin body; Ni silicide; in-diffusion; two-step annealing; radio-frequency
- Citation
- MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, v.147, no.2-3, pp.183 - 186
- Indexed
- SCIE
SCOPUS
- Journal Title
- MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
- Volume
- 147
- Number
- 2-3
- Start Page
- 183
- End Page
- 186
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/179028
- DOI
- 10.1016/j.mseb.2007.09.020
- ISSN
- 0921-5107
- Abstract
- A two-step annealing process for Ni silicide formation in an ultra-thin body (UTB) RF SoI MOSFET is proposed to prevent a dramatic increase of the gate leakage current from the in-diffusion of Ni into the channel. The first step of the annealing process was performed at a low temperature for di-nickel silicide (Ni2Si) formation, resulting in no in-diffusion of Ni into the channel. Next, the second step of the annealing process was performed at 500 degrees C for the formation of mono-nickel silicide (NiSi). Finally, the optimized Ni silicide SD with low resistance (5 Omega/square) and a low leakage current was achieved on the UTB. Using the proposed two-step silicide process, UTB RF MOSFET with a gate length of 50 nm a 20-nm UTB was successfully fabricated and showed the good RF properties with a cut-off frequency of 138 GHz.
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