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Resistance switching characteristics of HfO2 film with electrode for resistance change random access memory

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dc.contributor.authorPark, In-Sung-
dc.contributor.authorLee, Joo-Ho-
dc.contributor.authorLee, Sunwoo-
dc.contributor.authorAhn, Jinho-
dc.date.accessioned2022-12-21T05:28:43Z-
dc.date.available2022-12-21T05:28:43Z-
dc.date.issued2007-11-
dc.identifier.issn1533-4880-
dc.identifier.issn1533-4899-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/179377-
dc.description.abstractThe electrode dependent resistance switching behaviors of amorphous HfO2 films grown by atomic layer deposition were systematically investigated. The low and high resistance states were successfully achieved for all the metal-insulator-metal resistor systems with Mo, Ru, and Pt symmetric electrodes. The characteristic reset and set voltages as well as the dynamic resistance ratio of the resistor device are strongly dependent on the electrode material with different work function. In addition, the different features for switching voltages with electrode are shown with annealing temperature.-
dc.format.extent4-
dc.language영어-
dc.language.isoENG-
dc.publisherAmerican Scientific Publishers-
dc.titleResistance switching characteristics of HfO2 film with electrode for resistance change random access memory-
dc.typeArticle-
dc.publisher.location미국-
dc.identifier.doi10.1166/jnn.2007.18091-
dc.identifier.scopusid2-s2.0-38449118732-
dc.identifier.wosid000250576500100-
dc.identifier.bibliographicCitationJournal of Nanoscience and Nanotechnology, v.7, no.11, pp 4139 - 4142-
dc.citation.titleJournal of Nanoscience and Nanotechnology-
dc.citation.volume7-
dc.citation.number11-
dc.citation.startPage4139-
dc.citation.endPage4142-
dc.type.docTypeArticle; Proceedings Paper-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaChemistry-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaPhysics-
dc.relation.journalWebOfScienceCategoryChemistry, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalWebOfScienceCategoryPhysics, Condensed Matter-
dc.subject.keywordPlusPOLYCRYSTALLINE NIO FILMS-
dc.subject.keywordPlusATOMIC-LAYER DEPOSITION-
dc.subject.keywordPlusGATE DIELECTRICS-
dc.subject.keywordPlusOXIDE-FILMS-
dc.subject.keywordPlusINTERFACE-
dc.subject.keywordAuthorresistance switching effect-
dc.subject.keywordAuthorresistance change random access memory-
dc.subject.keywordAuthorHfO2-
dc.subject.keywordAuthoratomic layer deposition-
dc.subject.keywordAuthormetal electrode-
dc.identifier.urlhttps://www.ingentaconnect.com/content/asp/jnn/2007/00000007/00000011/art00100-
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