Feasibility of multi-walled carbon nanotube probes in AFM anodization lithography
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, Ji Sun | - |
dc.contributor.author | Bae, Sukiong | - |
dc.contributor.author | Ahn, Sang Jung | - |
dc.contributor.author | Kim, Dal Hyun | - |
dc.contributor.author | Jung, Ki Young | - |
dc.contributor.author | Han, Cheolsu | - |
dc.contributor.author | Chung, Chung Choo | - |
dc.contributor.author | Lee, Haiwon | - |
dc.date.accessioned | 2022-12-21T05:46:09Z | - |
dc.date.available | 2022-12-21T05:46:09Z | - |
dc.date.created | 2022-08-26 | - |
dc.date.issued | 2007-10 | - |
dc.identifier.issn | 0304-3991 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/179478 | - |
dc.description.abstract | Multi-walled carbon nanotube (CNT) tips were used in atomic force microscope (AFM) anodization lithography to investigate their advantages over conventional tips. The CNT tip required a larger threshold voltage than the mother silicon tip due to the Schottky barrier at the CNT-Si interface. Current-to-voltage curves distinguished the junction property between CNTs and mother tips. The CNT-platinum tip, which is more conductive than the CNT-silicon tip, showed promising results for AFM anodization lithography. Finally, the nanostructures with high aspect ratio were fabricated using a pulsed bias voltage technique as well as the CNT tip. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.title | Feasibility of multi-walled carbon nanotube probes in AFM anodization lithography | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Chung Choo | - |
dc.identifier.doi | 10.1016/j.ultramic.2007.03.014 | - |
dc.identifier.scopusid | 2-s2.0-34547121469 | - |
dc.identifier.wosid | 000249142600035 | - |
dc.identifier.bibliographicCitation | ULTRAMICROSCOPY, v.107, no.10-11, pp.1091 - 1094 | - |
dc.relation.isPartOf | ULTRAMICROSCOPY | - |
dc.citation.title | ULTRAMICROSCOPY | - |
dc.citation.volume | 107 | - |
dc.citation.number | 10-11 | - |
dc.citation.startPage | 1091 | - |
dc.citation.endPage | 1094 | - |
dc.type.rims | ART | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Microscopy | - |
dc.relation.journalWebOfScienceCategory | Microscopy | - |
dc.subject.keywordPlus | ATOMIC-FORCE MICROSCOPE | - |
dc.subject.keywordPlus | LOCAL OXIDATION | - |
dc.subject.keywordPlus | SILICON | - |
dc.subject.keywordPlus | TIPS | - |
dc.subject.keywordPlus | GROWTH | - |
dc.subject.keywordPlus | NANOFABRICATION | - |
dc.subject.keywordPlus | CARBIDE | - |
dc.subject.keywordAuthor | AFM anodization lithography | - |
dc.subject.keywordAuthor | CNT tip | - |
dc.subject.keywordAuthor | threshold voltage | - |
dc.subject.keywordAuthor | pulsed bias voltage | - |
dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S0304399107001301?via%3Dihub | - |
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