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Effect of nanoscale multilayered structurization on hardness and wear resistance in Al-Cr-N coating
- Issue Date
- Sep-2007
- Publisher
- Trans Tech Publications Ltd
- Keywords
- Al-Cr-N; Coating; Hardness; Nanoscale multilayer; Residual stress; Wear resistance
- Citation
- Solid State Phenomena, v.124-126, no.PART 2, pp.1305 - 1308
- Indexed
- SCOPUS
- Journal Title
- Solid State Phenomena
- Volume
- 124-126
- Number
- PART 2
- Start Page
- 1305
- End Page
- 1308
- ISSN
- 1012-0394
- Abstract
- Al-Cr-N coatings were deposited on Si substrate by unbalanced magnetron (UBM) sputtering with Al and Cr targets and Ar and N2 reactive gases at substrate bias of -50V. At a fixed chamber pressure of 0.8 Pa, the microstructure of the coatings was changed from AlN/CrN nanoscale multilayered structure to (Al.Cr)N mixed single layered one with the increase of rotation speed of substrate holder. The residual compressive stress of AlN/CrN nanoscale multilayered coating was higher than that of (Al,Cr)N single layered coating. For the AlN/CrN nanoscale multilayered coating, the residual compressive stress was reduced with increase in total pressure of reactive gases. The AlN/CrN nanoscale multilayered coatings with higher residual compressive stress showed higher hardness and wear resistance.
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Collections - 서울 공과대학 > 서울 신소재공학부 > 1. Journal Articles
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Related Researcher
- Kim, Young Do
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)