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Self-assembled monolayers, SAMs자기조립 단분자막

Other Titles
자기조립 단분자막
Authors
Sung, Myung Mo
Issue Date
Sep-2007
Publisher
KOREAN INST METALS MATERIALS
Keywords
self-assembled monolayers; micocontact printing; atomic layer deposition
Citation
ELECTRONIC MATERIALS LETTERS, v.3, no.3, pp.137 - 145
Indexed
SCIE
Journal Title
ELECTRONIC MATERIALS LETTERS
Volume
3
Number
3
Start Page
137
End Page
145
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/179653
ISSN
1738-8090
Abstract
Self-assembled monolayers (SAMs) are thin organic films which form spontaneously on solid surfaces. They have been shown to be useful as passivating layers and also for the modification of surface properties. Potential applications include wetting, adhesion, friction, chemical sensing, ultrafine scale lithography, and protection of metals against corrosion. Among these techniques for generating patterned SAMs, microcontact printing is the most practical because it is simple and rugged. This technique has been used to produce substrates for several different applications. Atomic layer deposition (ALD) is a gas-phase thin film deposition method using self-terminating surface reactions. ALD process is very sensitive to the surface conditions of the substrates, it offers an ideal method for selective deposition of thin films on patterned SAMs.
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