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Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer

Authors
Woo, Chang SeungLim, Chae HyunCho, Chi WonPark, BonghyunJu, HeongkyuMin, Dong HunLee, Cheol JinLee, Seung Beck
Issue Date
May-2007
Publisher
ELSEVIER SCIENCE BV
Keywords
carbon nanotubes; flexible thin-film; gas sensor
Citation
MICROELECTRONIC ENGINEERING, v.84, no.5-8, pp.1610 - 1613
Indexed
SCIE
SCOPUS
Journal Title
MICROELECTRONIC ENGINEERING
Volume
84
Number
5-8
Start Page
1610
End Page
1613
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/180157
DOI
10.1016/j.mee.2007.01.162
ISSN
0167-9317
Abstract
We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large area. The optical transmittance of the SWCNT thin-films showed inverse proportionality to SWCNT density and conductivity indicating that the SWCNT's PDMS surface coverage was directly related to the thin-film's optical and electrical characteristics. The flexible SWCNT thin-film showed high mechanical stability with negligible change in conductance after being bent by 180 degrees. It was shown that SWCNT thin-film conductance had high sensitivity to NH3 gas partial pressure and that the lower the density of SWCNTs the higher the sensitivity. The results show that the flexible SWCNT thin-films may be applicable to future high sensitivity mobile sensors.
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COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)
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