Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer
- Authors
- Woo, Chang Seung; Lim, Chae Hyun; Cho, Chi Won; Park, Bonghyun; Ju, Heongkyu; Min, Dong Hun; Lee, Cheol Jin; Lee, Seung Beck
- Issue Date
- May-2007
- Publisher
- ELSEVIER SCIENCE BV
- Keywords
- carbon nanotubes; flexible thin-film; gas sensor
- Citation
- MICROELECTRONIC ENGINEERING, v.84, no.5-8, pp.1610 - 1613
- Indexed
- SCIE
SCOPUS
- Journal Title
- MICROELECTRONIC ENGINEERING
- Volume
- 84
- Number
- 5-8
- Start Page
- 1610
- End Page
- 1613
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/180157
- DOI
- 10.1016/j.mee.2007.01.162
- ISSN
- 0167-9317
- Abstract
- We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large area. The optical transmittance of the SWCNT thin-films showed inverse proportionality to SWCNT density and conductivity indicating that the SWCNT's PDMS surface coverage was directly related to the thin-film's optical and electrical characteristics. The flexible SWCNT thin-film showed high mechanical stability with negligible change in conductance after being bent by 180 degrees. It was shown that SWCNT thin-film conductance had high sensitivity to NH3 gas partial pressure and that the lower the density of SWCNTs the higher the sensitivity. The results show that the flexible SWCNT thin-films may be applicable to future high sensitivity mobile sensors.
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