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Observation of complete oxidation of InN to In2O3 in air at elevated temperatures by using X-ray photoemission spectroscopy

Authors
Lee, Ik JaeYu, Chung-JongHur, Tae-BongKim, Hyung-KookKim, Chae-OkKim, Jae-Yong
Issue Date
Nov-2006
Publisher
KOREAN PHYSICAL SOC
Keywords
complete oxidation; InN; X-ray photoemission spectroscopy
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.49, no.5, pp.2176 - 2179
Indexed
SCIE
SCOPUS
KCI
Journal Title
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume
49
Number
5
Start Page
2176
End Page
2179
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/180777
ISSN
0374-4884
Abstract
We present here an X-ray photoemission spectroscopy (XPS) analysis of a polycrystalline InN film on sapphire. The InN was completely oxidized to bixbyite in air after annealing at high temperatures. The analysis of the X-ray diffraction data demonstrated that the oxidation process started around 450 degrees C. The high-resolution XPS data showed the In3d peaks and the N1s main peak located near 396.4 eV for the InN films. After oxidation, the N1s peak had completely disappeared while the In3d peaks had not changed. These results strongly indicate that the oxidation transformed the structure of InN film to In2O3.
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