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Use of successive ionic layer adsorption and reaction (SILAR) method for amorphous titanium dioxide thin films growth

Authors
Kale, SangramMane, Rajaram S.Chung, HoeilYoon, Moon-YoungLokhande, C. D.Han, Sung-Hwan
Issue Date
Nov-2006
Publisher
Elsevier BV
Keywords
titanium dioxide; SILAR; XRD; SEM; UV-vis; electrical resistivity
Citation
Applied Surface Science, v.253, no.2, pp 421 - 424
Pages
4
Indexed
SCIE
SCOPUS
Journal Title
Applied Surface Science
Volume
253
Number
2
Start Page
421
End Page
424
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/180796
DOI
10.1016/j.apsusc.2005.12.082
ISSN
0169-4332
1873-5584
Abstract
Use of successive ionic layer adsorption and reaction (SILAR) method was preferred for the growth of amorphous titanium dioxide (TiO2) thin films at ambient temperature. Further, these films were annealed at 673 K for 2 h in air for structural improvement and characterized for structural, surface morphological, optical and electrical properties. An amorphous structure of TiO2 was retained even after annealing as confirmed from XRD studies. The spherical grains of relatively large size were compressed after annealing. A red shift in band gap energy and decrease in electrical resistivity were observed due to annealing treatment.
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