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Nonlinear structural dynamic analyses of micro cantilever beams actuated by electrostatic force

Authors
Yoo, Hong HeeSong, SimonJung, Kang SikKim, Kwan Yong
Issue Date
Oct-2006
Publisher
Trans Tech Publications Ltd.
Keywords
micro cantilever beam; electrostatic force; modal analysis; stability analysis; design
Citation
Key Engineering Materials, v.321-323, pp 1644 - 1648
Pages
5
Indexed
SCIE
SCOPUS
Journal Title
Key Engineering Materials
Volume
321-323
Start Page
1644
End Page
1648
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/180933
DOI
10.4028/www.scientific.net/KEM.321-323.1644
ISSN
1013-9826
1662-9795
Abstract
Nonlinear modeling method for the structural dynamic analysis of a micro cantilever beam actuated by electrostatic force is presented in this study. Static deflection is first obtained by solving nonlinear static equilibrium equation and the modal and the stability characteristics are calculated at the static equilibrium position. It is found that the amplitude and the frequency of the applied electrostatic voltage influence the stability of the structure significantly.
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