Effect of calcination process on synthesis of ceria particles, and its influence on shallow trench isolation chemical mechanical planarization performance
- Authors
- Kim, Dae-Hyeong; Kang, Hyun-Goo; Kim, Sang-Kyun; Paik, Ungyu; Park, Jea-Gun
- Issue Date
- Jun-2006
- Publisher
- JAPAN SOC APPLIED PHYSICS
- Keywords
- calcination; density; particle size distribution; agglomeration; ceria; slurry; STI CMP
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.45, no.6A, pp.4893 - 4897
- Indexed
- SCIE
SCOPUS
- Journal Title
- JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
- Volume
- 45
- Number
- 6A
- Start Page
- 4893
- End Page
- 4897
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/181381
- DOI
- 10.1143/JJAP.45.4893
- ISSN
- 0021-4922
- Abstract
- The effect of the calcination process for cerium carbonate, a precursor of ceria, on the degree of synthesis and colloidal properties of ceria particles in aqueous media, which greatly influence shallow trench isolation (STI) chemical mechanical planarization (CMP) performance, was investigated. A two-step calcination process, consisting of decarbonation and crystal growth, resulted in a higher degree of synthesis for the same crystal size, a narrower particle size distribution, and better dispersion of the ceria particles, than conventional one-step calcination. These properties enhanced certain aspects of STI CMP performance, leading to a higher oxide removal rate, a better selectivity between oxide and nitride, and fewer defects, including remaining particles.
- Files in This Item
-
Go to Link
- Appears in
Collections - 서울 공과대학 > 서울 융합전자공학부 > 1. Journal Articles
- 서울 공과대학 > 서울 에너지공학과 > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/181381)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.