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Metal oxide thin film dep osition technology for man ufacturing plasma resistant sub st rate materials
- Authors
- 좌용호
- Issue Date
- 28-Nov-2023
- Place
- 경주시
- Conference Name
- APMA 2023
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Collections - 서울 공과대학 > 서울 기계공학부 > 1. Journal Articles
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Related Researcher
- CHOA, YONG HO
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)